Buckled cantilevers for out-of-plane platforms
نویسندگان
چکیده
In this paper, we show how surface-micromachined buckled cantilevers can be used to construct out-of-plane structures. We include the relevant theory necessary to predict the height and angle of plates attached to buckled cantilevers, as well as the mechanical stresses involved in assembly. These platforms can be assembled to any angle between 0◦ and 90◦ with respect to the substrate by changing the attachment point and the amount of deflection. Example devices were fabricated using PolyMUMPsTM and assembled. Using these devices, the deflection of the buckled cantilevers was verified, as well as the placement for raised platforms.
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